Deposition and characterization of inorganic thin films by using UV-enhanced Atomic Layer Deposition

정진원 ,  성명모

한국진공학회 학술발표회초록집

2015 .02

In-Situ UV Illuminated Highly Conductive, Transparent ZnO Thin Film Electrodes

Indi ,  ajith Palani ,  Myung Mo Sung

한국진공학회 학술발표회초록집

2020 .08

Novel Zinc Precursors for ZnO Thin Film Deposition by ALD

Seong Ho Han ,  Raphael Edem Agbenyeke ,  Ga Yeon Lee 외 6명

한국진공학회 학술발표회초록집

2020 .08

In-Situ UV Illuminated Highly Conductive, Transparent ZnO Thin Film Electrode

Palani Indi ,  ajith ,  Myung Mo Sung

한국진공학회 학술발표회초록집

2020 .02

Single-Domain-Like Graphene with ZnO-Stitching by Defect-Selective Atomic Layer Deposition

김홍범 ,  박경선 ,  Nguyen Van Long 외 1명

한국진공학회 학술발표회초록집

2016 .02

Fabrication of wafer-scale single-domain-like graohene with enhanced electronic transport properties by defect-selective atomic layer deposition of conductive ZnO

유성호 ,  지현석 ,  성명모

한국진공학회 학술발표회초록집

2020 .02

CO oxidation catalyzed by NiO/mesoporous Al₂O₃

Sang Wook Han ,  Dae Han Kim ,  Eun Ji Pa 외 6명

한국진공학회 학술발표회초록집

2015 .02

Novel organic-inorganic thin films with monolayer precision using molecular layer deposition (MLD) and atomic layer deposition (ALD)

윤관혁 ,  김인정 ,  성명모

한국진공학회 학술발표회초록집

2015 .02

Effect of deposition temperature and thickness on surface properties of ALD TiO₂ films

장영문 ,  양병찬 ,  신정우 외 2명

한국진공학회 학술발표회초록집

2017 .02

The study of physical property for indium oxide grown by Atomic Layer Deposition (ALD)

Young Joon Cho ,  Hyo Sik Chang

한국진공학회 학술발표회초록집

2015 .02

Improved conductive air-stable ZnO thin film fabrication in in situ UV illumination

윤홍로 ,  오윤지 ,  성명모

한국진공학회 학술발표회초록집

2017 .02

Single-crystalline-graphene by defect-selective atomic layer deposition of hexagonal ZnO

Pham Hoang Giang ,  Myung Mo Sung

한국진공학회 학술발표회초록집

2020 .08

Fabrication of Organic-Inorganic Hybrid Encapsulation Layer by Atomic Layer Deposition and Molecular Layer Deposition

HongBum Kim ,  Myung.Mo Sung

한국진공학회 학술발표회초록집

2015 .02

The effect of ZnO buffer layer on the structural and electrical properties in the ZnO:(Al,P) thin films by the RF-magnetron sputtering

김창훈 ,  신승학 ,  이준형 외 2명

한국진공학회 학술발표회초록집

2017 .02

Electrical and optical properties of Al-doped ZnO films by UV treatment

방지홍 ,  이규상 ,  성명모

한국진공학회 학술발표회초록집

2017 .02

The Effect of Thickness on Flexible, Electrical and Optical properties of Ti- ZnO films on Flexible Glass by Atomic Layer Deposition

이우재 ,  윤은영 ,  권세훈

한국진공학회 학술발표회초록집

2016 .02

Thin Film Encapsulation with Organic-Inorganic Nano Laminate using Molecular Layer Deposition and Atomic Layer Deposition

윤관혁 ,  조보람 ,  방지홍 외 1명

한국진공학회 학술발표회초록집

2016 .02

Wafer scale well-connected CVD-grown graphene grains by using selective atomic layer deposition of ZnO

Nguyen Van Long ,  Sung Myung Mo

한국진공학회 학술발표회초록집

2017 .02

Pure Cobalt Thin Film by using Very High frequency (60MHz) Plasma-Enhanced Atomic Layer Deposition

Chang Hoon Song ,  Won Kyun Yeom ,  Doo San Kim 외 3명

한국진공학회 학술발표회초록집

2018 .08

Self-Limiting Surface Coating of SOFC Electrodes Using Atomic Layer Deposition of Inorganic Materials

Eui-Hyun Kim ,  Seung-Muk Bae ,  Ki-Won Seo 외 2명

한국진공학회 학술발표회초록집

2017 .02