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Plasma engineering for nano materials
한국진공학회 학술발표회초록집
2016 .08
Novel synthesis of nanocrystalline thin films by design and control of deposition energy and plasma
한국진공학회 학술발표회초록집
2016 .02
Enhancing some characteristic properties of magnetic micro-/nano- materials
한국자기학회 학술연구발표회 논문개요집
2016 .05
A parametric study of nanoparticle synthesis by the thermal plasma processing
한국진공학회 학술발표회초록집
2020 .02
Numerical modeling for large area plasma source for materials processing
한국진공학회 학술발표회초록집
2016 .08
Plasma deposition of functional nanocomposites
한국진공학회 학술발표회초록집
2016 .08
Synthesis and Characterization of SnO2 Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition Using SnCl4 Precursor and Oxygen Plasma
한국진공학회 학술발표회초록집
2016 .02
Spectroscopic Analysis of Effects of Additive Nitrogen on Atmospheric Pressure Ar/HMDS Plasma
Applied Science and Convergence Technology
2023 .09
Synthesis of nano-silicon and graphite hybrid using radio frequency-thermal plasma
한국진공학회 학술발표회초록집
2016 .08
Enhancement of the Virtual Metrology Performance for Plasma-assisted Processes by Using Plasma Information (PI) Parameters
한국진공학회 학술발표회초록집
2015 .08
Chemistry for nano, and nano for medicine & energy
한국진공학회 학술발표회초록집
2016 .08
Plasma-induced reaction at plasma-liquid and plasma-polymeric film interface by AC-driven atmospheric pressure plasma
한국진공학회 학술발표회초록집
2019 .08
낮은 GWP를 가진 CxF2xO 을 이용한 SiO2 식각 공정 특성에 관한 연구
한국진공학회 학술발표회초록집
2020 .02
VHF-PECVD for a-Si:H and a-SiN:H Film Deposition
Applied Science and Convergence Technology
2019 .09
Microwave Plasma Source Optimization for Thin Film Deposition Applications
Applied Science and Convergence Technology
2022 .03
Characteristic analysis of HfO2 thin films deposited at low-temperature using direct plasma-enhanced atomic layer deposition
한국진공학회 학술발표회초록집
2020 .02
Low-temperature synthesis of graphene structure using plasma-assisted chemical vapor deposition system
한국진공학회 학술발표회초록집
2016 .02
Correlation Analysis of Plasma Optical Emission Spectra and Silicon Nitride Films Deposited in Inductively Coupled Plasmas
한국진공학회 학술발표회초록집
2021 .02
Enhanced Anti-reflective Effect of SiNx/SiOx/InSnO Multi-layers using Plasma Enhanced Chemical Vapor Deposition System with Hybrid Plasma Source
Applied Science and Convergence Technology
2016 .07
Plasma Optical Signal Analysis for SiNx Plasma Enhanced Chemical Vapor Deposition Processes
한국진공학회 학술발표회초록집
2019 .08
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