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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.26 No.1
- 발행연도
- 2017.1
- 수록면
- 16 - 19 (4page)
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초록· 키워드
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A thin metal layer of molybdenum is placed between the conventional barrier layer and the stainless steel substrate for investigating the diffusion property of iron (Fe) atoms. In this study, the protection probability was confirmed by measuring the concentration of out-diffused Fe using a SIMS depth profile. The Fe concentration of chromium (Cr) barrier layer with 10 nm molybdenum (Mo) layer is 5 times lower than that of Cr barrier without the thin Mo layer. The insertion of a thin Mo metal layer between the barrier layer and the stainless steel substrate effectively protects the out-diffusion of Fe atoms.
목차
Abstract
I. Introduction
II. Experiments
III. Results and Discussion
IV. Summary
References
참고문헌 (13)
참고문헌 신청
Blosch, D. Guttler, A. Chirila, and A.N. Tiwari, Thin Solid Films 519, 7453 (2011).
J. Perrenoud, B. Schaffner, S. Buecheler and A. N. Tiwari, Solar Energy Materials & Solar Cells 95, S8 (2011).
J. Moon, D. ?J. Park, C. H. Chung, Y. -H. Kim, S. J. Yun, J.W. Lim, J.-H. Lee, Mater. Res. Soc. Symp. Proc. 910, 0910-A18-03 (2006).
Otte, L. Makhova, A. Braun, and I. Konovalov, Thin Solid Films 511-512, 613 (2006).
F. Kessler, D. Herrmann, and M. Powalla, Thin Solid Films 480, 491 (2005).
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