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논문 기본 정보

Type
Thesis
Author

이태현 (광운대학교, 광운대학교 대학원)

Adviser
권기청
Issue Year
2020
Copyright
광운대학교 thesis is protected by copyright.

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Research history (4)

2020

대면적 대기압 플라즈마를 사용한 태양전지용 P타입 결정질 실리콘 웨이퍼 내 인 불순물 확산 연구
이태현 ,  박연수 ,  온범수 and others 6 한국진공학회 학술발표회초록집 2020.02 Proceeding
Diffusion of phosphorus impurities in p-type crystralline silicon using atmospheric pressure large area plasma
이태현 전자바이오물리학과 2020.01 Thesis

2019

대기압 플라즈마를 이용한 결정질 실리콘 태양전지 텍스처링 연구
이태현 ,  온범수 ,  이환희 and others 4 한국진공학회 학술발표회초록집 2019.08 Proceeding
반응성 이온 식각과 대기압 플라즈마를 이용한 텍스처링 연구
이태현 ,  이환희 ,  신기원 and others 3 한국진공학회 학술발표회초록집 2019.02 Proceeding
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Abstract· Keywords

Report Errors
A solar cell is a device that converts light energy into electrical energy
using the photovoltaic effect. Recently, due to the exhaustion of fossil energy,
a technology that converts sunlight, an infinite energy source into electrical
energy, has been spotlighted and continuous research and development has
been conducted. There are several methods for forming p-n junctions to
determine the electrical properties of solar cells, and conventional methods
include thermal diffusion, ion implantation, and laser doping. However, these
processes have the disadvantage of expensive equipment and long processing
time.
In this study, diffusion of phosphorus impurities was carried out in a p-type
crystalline silicon wafer <100> using atmospheric pressure large area plasma.
When the impurities were diffused using atmospheric large-area plasma, the
concentration and junction depth of the diffused impurities on the wafer were
confirmed by SIMS(Secondary Ion Mass Spectroscopy) analysis.
As a result of SIMS analysis, the surface concentration and the junction
depth changed according to the RF applied power and the exposure time of
plasma

Contents

제1장. 서론 1
제2장. 관련 이론 3
2.1. 실리콘 기반 태양전지의 기본 구조 및 원리 3
2.2. 결정질 태양전지 제조 공정 과정 6
2.2.1. 실리콘 잉곳 제작 6
2.2.2. 유기, 무기 물질 세정 및 건조 작업 7
2.2.3. 표면 결함 제거 및 표면 조직화공정 8
2.2.4. 도펀트 코팅 공정 10
2.2.5. 도펀트 확산 공정 11
2.2.6. 산화막 제거? 12
2.2.7. 반사방지막 및 표면 재결합 방지막 형성 12
2.2.8. 전극 형성 및 소성 14
2.2.9. 태양전지 가장자리 절연 15
2.3. 불순물 확산 16
2.3.1. 확산과 불순물 확산 프로파일 16
2.3.2. 확산의 수학적 모형 17
2.4. 확산의 평가 21
2.4.1. 4 탐침법 21
2.4.2. 이차이온질량분석(Secondary Ion Mass Spectroscopy, SIMS) 23
2.4.3. -PCD 측정 24
2.4.4. 솔라 시뮬레이터 25
제 3장. 실험 28
3.1. 연구 목적 및 필요성 28
3.2. 실험 방법 29
3.3. 실험 결과 33
3.3.1. 대면적 대기압 플라즈마 장치의 전기적 특성 33
3.3.2. p형 결정질 실리콘 웨이퍼<100>의 표면손상제거 및 표면조직화 공정 40
3.3.3. H3PO4(Con, 4%)인 도펀트를 이용한 대면적 대기압 플라즈마 도핑 42
3.3.4. H3PO4(Con, 15%)인 도펀트를 이용한 대면적 대기압 플라즈마 도핑 48
3.3.5. 에너지 분산형 X-선 분광법을 사용한 불순물 분석 54
제 4장. 결론 57
참고 문헌 59

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