Structural influence of Al-doped zinc oxide thin films on nano-textured silicon substrate by RF magnetron sputtering

Sel Gi RYU ,  Hyung Yong JI ,  Bhaska 외 4명

한국진공학회 학술발표회초록집

2016 .08

Effect of Pressure and Temperature on Al-doped Zinc Oxide Thin Films Deposited by Radio Frequency Magnetron Sputtering

Junyoung Kang ,  Hyeongsik Pa ,  k 외 1명

한국진공학회 학술발표회초록집

2016 .02

Magnetic field optimization for high power impulse magnetron sputtering

David RUZIC ,  P ,  iya RAMAN 외 3명

한국진공학회 학술발표회초록집

2016 .08

Large-area graphene layer grown by using high power impulse magnetron sputtering

Man-Jia PO ,  De-Chiuan LIOU ,  Min-Yi CHEN 외 2명

한국진공학회 학술발표회초록집

2016 .08

Electrical and optical properties of Ga-doped ZnO thin films prepared by RF magnetron Co-sputtering systems

Nam-Jung KIM ,  Naeho SHIN ,  Chang-Su HWANG

한국진공학회 학술발표회초록집

2016 .08

Nitrogen doped Titanium Oxide Thin Films Fabricated by DC Magnetron Sputtering Method

H. Jee ,  J. W. Jang ,  S. J. Lee 외 1명

한국진공학회 학술발표회초록집

2020 .08

Flexible control of residual stress of (Ti,Al)N films by regulating pulse duration in high power impulse magnetron sputtering

Shuji TAKAHASHI ,  Tetsuhide SHIMIZU ,  Yoshikazu TERANISHI 외 3명

한국진공학회 학술발표회초록집

2016 .08

Characterization of zinc tin oxide thin films by UHV RF magnetron co-sputter deposition

Seunghwan Hong ,  Gyujin Oh ,  Eun Kyu Kim

한국진공학회 학술발표회초록집

2016 .02

Electrical and optical properties of Al doped Zinc-Tin Oxide Thin-Film-Transistor

황상빈 ,  소현섭 ,  이호선

한국진공학회 학술발표회초록집

2018 .02

Influence of Sputtering Pressure on the Conductivity and Transparency of Aluminum-Doped Zinc Oxide Films

Hyeong Gi Pa ,  k ,  Keun Heo 외 2명

Applied Science and Convergence Technology

2023 .11

A study on the optical and electrical properties of nickel oxide thin films deposited by reactive magnetron sputtering process

Seong woo Jang ,  Sehoon Hwang ,  Sang-Ho Lim 외 1명

한국진공학회 학술발표회초록집

2017 .02

Optimization for electrical and structural properties of aluminum thin films deposited on glass by DC magnetron sputtering

Shahinu ,  RAHMAN ,  Heon-Ju LEE 외 3명

한국진공학회 학술발표회초록집

2016 .08

RF Magnetron Sputtering를 이용한 a축 ZnO:Al 박막의 구조적, 전기적 특성 연구

Junyoung Kang ,  Hyeongsik Pa ,  k 외 2명

한국진공학회 학술발표회초록집

2015 .02

Structural and morphological properties change of Zn and Sn thin films by sputter time

이석희 ,  박주연 ,  최아롬 외 3명

한국진공학회 학술발표회초록집

2017 .02

Optical Properties of Anti-reflection Coating in Visible Range

김경훈 ,  김성민 ,  이근혁 외 4명

한국진공학회 학술발표회초록집

2015 .02

Al doped zinc oxide thin film growth by CVD for transparent conductor application

Keon Woo YANG ,  Jung Sam JUNG ,  Sung-Ku KWON

한국진공학회 학술발표회초록집

2016 .08

Bulk and Surface of Al2O3 doped ZnO Films at Different Target Angles by DC magnetron sputtering

Junyoung Kang ,  Hyeongsik Pa ,  k 외 1명

한국진공학회 학술발표회초록집

2016 .02

Improved electrical properties of Sn-doped Indium-Zinc-Oxide thin film transistors

Kiwon LIM ,  Byoung Deog CHOI

한국진공학회 학술발표회초록집

2016 .08

Microstructures, electrical and optical properties of NiO films deposited by reactive magnetron sputtering at various oxygen working pressures

S. C. CHEN ,  C. F. LU ,  M. H. LIN 외 3명

한국진공학회 학술발표회초록집

2016 .08

Properties of CrTiBN coatings fabricated by a hybrid coating system with high power impulse magnetron sputtering (HIPIMS) and radio frequency (RF) sputtering

Chi-Yu LU ,  Jyh-Wei LEE

한국진공학회 학술발표회초록집

2016 .08