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Effect of plasma properties on characteristics of silicon nitride film deposited by PECVD process at low temperature
한국진공학회 학술발표회초록집
2016 .08
Plasma 모델링과 시뮬레이션을 위한 웹기반 Plasma Chemistry 데이터베이스
한국진공학회 학술발표회초록집
2019 .08
Correlation Analysis of Plasma Properties and Film Properties using Optical Emission Spectroscopy in Plasma Enhanced Chemical Vapor Deposition Processes of Silicon Nitride
한국진공학회 학술발표회초록집
2020 .08
Accurate measurement of water vapor transmission rate of gas barrier films
한국진공학회 학술발표회초록집
2017 .08
Correlation Study between Optical Emission Spectroscopy Signals and Silicon Nitride Film Properties in Plasma Enhanced Chemical Vapor Deposition Processes
한국진공학회 학술발표회초록집
2020 .02
Environmental reliability and barrier properties of SiOx, SiNx thin film by roll-to-roll PECVD system
한국진공학회 학술발표회초록집
2019 .08
Prediction of Silicon Nitride Film Properties by the Analysis of Optical Emission Spectroscopy Signals in Plasma Enhanced Chemical Vapor Deposition Processes
한국진공학회 학술발표회초록집
2020 .02
Silicon Thin-film Solar Cell Deposited by Using High Working Pressure Plasma-enhanced Chemical Vapor Deposition System
한국진공학회 학술발표회초록집
2015 .02
Plasma Optical Signal Analysis for SiNx Plasma Enhanced Chemical Vapor Deposition Processes
한국진공학회 학술발표회초록집
2019 .08
Synthesis of silicon nitride thin film for high permeation barrier performance with RF power variation on hollow cathode RF PECVD
한국진공학회 학술발표회초록집
2018 .02
Low Temperature PECVD process for SiNx/Organic Multilayer Thin Film Encapsulation
한국진공학회 학술발표회초록집
2017 .02
Low-temperature PECVD silicon nitride film for the fabrication of capacitance type pressure sensor
한국진공학회 학술발표회초록집
2016 .08
Correlation Analysis of Plasma Optical Emission Spectra and Silicon Nitride Films Deposited in Inductively Coupled Plasmas
한국진공학회 학술발표회초록집
2021 .02
Water vapor barrier properties of polymer-like amorphous carbon deposited polyethylene naphthalate film
한국진공학회 학술발표회초록집
2016 .02
VHF-PECVD for a-Si:H and a-SiN:H Film Deposition
Applied Science and Convergence Technology
2019 .09
Passivation Properties of Hydrogenated Silicon Nitrides deposited by PECVD
한국진공학회 학술발표회초록집
2016 .02
Characterization of Si-based thin Film for moisture Barrier Prepared by Roll-to-Roll Plasma Enhanced Chemical Vapor Deposition
한국진공학회 학술발표회초록집
2019 .08
Plasma-induced reaction at plasma-liquid and plasma-polymeric film interface by AC-driven atmospheric pressure plasma
한국진공학회 학술발표회초록집
2019 .08
Latent chemistry in plasma activated medium (PAM)
한국진공학회 학술발표회초록집
2016 .08
낮은 GWP를 가진 CxF2xO 을 이용한 SiO2 식각 공정 특성에 관한 연구
한국진공학회 학술발표회초록집
2020 .02
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