Correlation Study between Optical Emission Spectroscopy Signals and Silicon Nitride Film Properties in Plasma Enhanced Chemical Vapor Deposition Processes

Seunghun Han ,  Sun Jung Kim ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .02

Correlation Analysis of Plasma Properties and Film Properties using Optical Emission Spectroscopy in Plasma Enhanced Chemical Vapor Deposition Processes of Silicon Nitride

Seunghun Han ,  Byung hyun Oh ,  Heeyeop Chae

한국진공학회 학술발표회초록집

2020 .08

Plasma Optical Signal Analysis for SiNx Plasma Enhanced Chemical Vapor Deposition Processes

Yooncheol Shin ,  Sun Jung Kim ,  Sangin Lee 외 1명

한국진공학회 학술발표회초록집

2019 .08

Correlation Analysis of Plasma Optical Emission Spectra and Silicon Nitride Films Deposited in Inductively Coupled Plasmas

Seunghun Han ,  Byung hyun Oh ,  Yong soo Lim 외 1명

한국진공학회 학술발표회초록집

2021 .02

VHF-PECVD for a-Si:H and a-SiN:H Film Deposition

Jin Seok Kim

Applied Science and Convergence Technology

2019 .09

Silicon Thin-film Solar Cell Deposited by Using High Working Pressure Plasma-enhanced Chemical Vapor Deposition System

권정대 ,  남기석 ,  김동호

한국진공학회 학술발표회초록집

2015 .02

Formation of Graphene-Seeds on Silicon Nitride Using Chemical Vapor Deposition

강도연 ,  박세근 ,  이준영 외 4명

한국진공학회 학술발표회초록집

2015 .02

Effect of plasma properties on characteristics of silicon nitride film deposited by PECVD process at low temperature

Jeon G. HAN ,  Jun S. LEE ,  Bibhuti B. SAHU 외 3명

한국진공학회 학술발표회초록집

2016 .08

Double antireflection thin film by plasma enhanced chemical vapor deposition for silicon solar cell

Dongsung LEE

한국진공학회 학술발표회초록집

2016 .08

Spectroscopic Analysis of Effects of Additive Nitrogen on Atmospheric Pressure Ar/HMDS Plasma

Jonggu Han ,  Rodolphe Mauchauffé ,  Se Youn Moon

Applied Science and Convergence Technology

2023 .09

Enhanced Anti-reflective Effect of SiN_x/SiO_x/InSnO Multi-layers using Plasma Enhanced Chemical Vapor Deposition System with Hybrid Plasma Source

Min-Jun Choi ,  O Dae Kwon ,  Sang Dae Choi 외 3명

Applied Science and Convergence Technology

2016 .07

Low Temperature PECVD process for SiNx/Organic Multilayer Thin Film Encapsulation

Hyung June Ahn ,  Sang Heon Yong ,  Sun Jung Kim 외 3명

한국진공학회 학술발표회초록집

2017 .02

Realization of efficient barrier performance of a silicon nitride film simply via plasma chemistry

이준석 ,  Yong Yi Yin ,  B. B. Sahu 외 1명

한국진공학회 학술발표회초록집

2017 .02

Synthesis of hexagonal boron nitride using high-pressure chemical vapor deposition

Joonwon Lee ,  Jaehyun Han ,  Jong-souk Yeo

한국진공학회 학술발표회초록집

2017 .08

Photosensor based on ReS2 film synthesized by chemical vapor deposition

임진호 ,  전다솜 ,  이승현

한국진공학회 학술발표회초록집

2020 .02

Silicon nitride deposition for flexible organic electronic devices by very high frequency plasma enhanced chemical vapor deposition using a multi-tile push-pull plasma source

지유진 ,  김기석 ,  김기현 외 3명

한국진공학회 학술발표회초록집

2017 .02

Silicon nitride deposition by VHF (162 MHz)-PECVD using a multi-tile push-pull plasma source

Ki Seok KIM ,  Albe ,  t Roge 외 2명

한국진공학회 학술발표회초록집

2016 .08

Plasma enhanced atomic layer deposition of silicon nitride using a VHF (162 MHz) plasma source

You Jin Ji ,  Ki Hyun Kim ,  Ki Seok Kim 외 5명

한국진공학회 학술발표회초록집

2020 .02

Reactions between silicon precursors and surface sites during atomic layer deposition of silicon nitride

Luchana L. YUSUP ,  Jae-Min PARK ,  Ti 외 5명

한국진공학회 학술발표회초록집

2016 .08

Passivation Properties of Hydrogenated Silicon Nitrides deposited by PECVD

Jae Eun Kim ,  Kyung Dong Lee ,  Yoonmook Kang 외 2명

한국진공학회 학술발표회초록집

2016 .02