Reactive Ion Etching of Ovonic Threshold Switch (OTS) Material using Hydrogen based Plasmas for PRAM device

김두산 ,  김주은 ,  길유정 외 1명

한국진공학회 학술발표회초록집

2020 .02

Reactive Ion Etching of PRAM material using Hydrogen based Gases

장윤종 ,  김두산 ,  길유정 외 2명

한국진공학회 학술발표회초록집

2020 .08

Multi-crystalline Silicon Solar Cell with Reactive Ion Etching Texturization

Seok Gi Pa ,  k ,  Min Gu Kang 외 3명

한국진공학회 학술발표회초록집

2016 .02

Sensitivity Enhancement of Fault Detection in Plasma Etching Processes using Optical Emission Spectroscopy with Multivariate Analysis

Hakseung Lee ,  Haegyu Jang ,  Honyoung Lee 외 1명

한국진공학회 학술발표회초록집

2015 .02

Electrical Characteristics of Te-based Ovonic Threshold Switching Devices by Post-Deposition Annealing

Chaebin Pa ,  k ,  Sang-Heon Pa 외 2명

한국진공학회 학술발표회초록집

2021 .02

Atomic Layer Etching of Tungsten using NF₃/O₂ plasma

길유정 ,  김두산 ,  김주은 외 1명

한국진공학회 학술발표회초록집

2019 .08

Optimizing interface between electrode and chalcogenide based material in Ovonic Threshold Switch devices

Jeong-Hyun Yoon ,  Jihye Lee ,  Sang-Heon Pa 외 3명

한국진공학회 학술발표회초록집

2019 .08

A study on the ion beam etching characteristics in the high aspect ratio contact

Ilhyeong LEE ,  Jongkyu KIM ,  Jongsoon PARK 외 6명

한국진공학회 학술발표회초록집

2016 .08

Development of analysis model for x-ray photoelectron spectroscopy spectra based on machine learning

MinA Lim ,  SooYeon Lim ,  Byeong-hyeon Lee 외 3명

한국진공학회 학술발표회초록집

2020 .08

RF Sputtering of SiTe for Ovonic Threshold Switching

Yoongu Lee ,  JaehyunHan ,  JeongunChoe 외 2명

한국진공학회 학술발표회초록집

2018 .02

The comparison of end-point detection between optical emission spectroscopy and residual gas analysis in silicon etching in NF3/Ar Plasma

Hee Tae Kwon ,  Woo Jae Kim ,  Gi Won Shin 외 3명

한국진공학회 학술발표회초록집

2018 .08

Machine Learning-Based Prediction of Atomic Layer Control for MoS² via Reactive Ion Etcher

Changmin Kim ,  Seunghwan Lee ,  Muyoung Kim 외 3명

Applied Science and Convergence Technology

2023 .09

Reactive Ion Beam Etching of CoFeB for Non-volatile Magnetic Random Access Memories

김두산 ,  김주은 ,  길유정 외 2명

한국진공학회 학술발표회초록집

2020 .02

Etch Characteristics of Magnetic Tunnel Junction Material using H₂/NH₃ Ion Beam

김예은 ,  김두산 ,  김주은 외 3명

한국진공학회 학술발표회초록집

2020 .08

Work function measurement of homogeneous MoS₂ layers using Ar-gas phase photoelectron spectroscopy

Dooyong Lee ,  Sehwan Song ,  Ji Woong Kim 외 8명

한국진공학회 학술발표회초록집

2017 .02

A study on the phenomenon of non uniformity at isolate pattern using ion beam etching

Jongsoon PARK ,  Jongkyu KIM ,  Sangkuk KIM 외 7명

한국진공학회 학술발표회초록집

2016 .08

Chemical state analysis of Al₂O₃ single crystal by X-ray photoelectron spectroscopy

Tsuguhi ,  o TAGO ,  Hi 외 6명

한국진공학회 학술발표회초록집

2016 .08

Ion Beam Etching (IBE) system에서의 Radical 제어 연구

김두산 ,  김건우 ,  장윤종 외 6명

한국진공학회 학술발표회초록집

2020 .08

Application of X-ray photoelectron spectroscopy (XPS) in ionic liquids

박주연 ,  서초현 ,  서성용 외 1명

한국진공학회 학술발표회초록집

2015 .08

X-ray Photoelectron and Auger Electron Spectroscopies and Their Applications in Materials Research

B ,  idget R. Roge ,  s

한국진공학회 학술발표회초록집

2017 .08