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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.26 No.2
- 발행연도
- 2017.3
- 수록면
- 30 - 33 (4page)
이용수
초록· 키워드
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ZnO thin films which were deposited by RF magnetron sputtering system were annealed by furnace and insitu heat treatment methods. We investigated the effect of heat treatment method on physical properties of ZnO thin films. The structural and optical properties of ZnO thin films were improved by heat treatment. Through the annealing treatment of ZnO film by furnace, the good crystallinity and ultraviolet emission were obtained. These results are attributed to the improved formation of Zn-O bond in ZnO thin film annealed at by furnace. We confirm that the formation of Zn-O bond plays an important role in obtaining the excellent structural and optical properties of ZnO thin films.
목차
Abstract
I. Introduction
II. Experimental Procedure
III. Results and Discussions
IV. Conclusions
References
참고문헌 (13)
참고문헌 신청
Y. R. Ryu, T. S. Lee, J. H. Lee, and H. W. White, Appl. Phy. Lett. 83, 4032 (2003).
J. Y. Lee, Y. S. Choi, J. H. Kim, M. O. Park, and S. Im, Thin Solid Films 403/404, 553 (2002).
N. Saito, H. Haneda, T. Sekiguchi, N. Ohashi, I. Sakaguchi, and K. Koumoto, Adv. Mater. 14, 418 (2002).
A. B. M. A. Ashrafi, A. Ueta, A. Avramescu, H. Kumano, and I. Suemune, Appl. Phys. Lett. 88, 550 (2000).
Y. Y. Kim, C. H. An, H. K. Cho, J. H. Kim, H. S. Lee, E. S. Jung, and H. S. Kim, Thin Solid Films 516, 5602 (2008).
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UCI(KEPA) : I410-ECN-0101-2019-420-001276438