Structural influence of Al-doped zinc oxide thin films on nano-textured silicon substrate by RF magnetron sputtering

Sel Gi RYU ,  Hyung Yong JI ,  Bhaska 외 4명

한국진공학회 학술발표회초록집

2016 .08

Surface properties of Nb oxide thin films prepared by rf sputtering

박주연 ,  강용철

한국진공학회 학술발표회초록집

2016 .02

Characterization of zinc tin oxide thin films by UHV RF magnetron co-sputter deposition

Seunghwan Hong ,  Gyujin Oh ,  Eun Kyu Kim

한국진공학회 학술발표회초록집

2016 .02

Deposition technique of IGZO film for large sputtering cathode

Yasuo OOKUBO ,  Makoto ARAI ,  Junya KIYOTA 외 1명

한국진공학회 학술발표회초록집

2016 .08

Structure-Zone Modeling of Sputter-Deposited Thin Films : A Brief Review

Eiji Kusano

Applied Science and Convergence Technology

2019 .11

라디오파 마그네트론 스퍼터링으로 성장한 CaWO₄:Dy³⁺ 박막의 광학, 구조, 표면 특성

조신호

새물리

2023 .10

Study of Chromium thin films deposited by DC magnetron sputtering under glancing angle deposition at low working pressure

Kwang-Jin Bae ,  Jae-Hoon Ju ,  Young-Rae Cho

한국진공학회 학술발표회초록집

2015 .08

Development of a thin-film deposition system for X-ray mirror coating

김정수 ,  임준 ,  김종현 외 1명

한국진공학회 학술발표회초록집

2021 .02

Analysis of a-IGZO channel layer deposited via Pulsed-DC sputtering

Jiwon Choi ,  Jaemin Kim ,  Eun-Chel Cho 외 1명

한국진공학회 학술발표회초록집

2021 .02

Sputtering 공정 중 발생 된 in-film defect 분석 방법

정현재 ,  이선영 ,  김형우 외 1명

한국진공학회 학술발표회초록집

2017 .02

Co-sputtering 방법으로 증착한 Molybdenum 도핑된 Indium Oxide 박막의 특성변화 연구

전지아 ,  오규진 ,  김은규

한국진공학회 학술발표회초록집

2015 .02

Growth kinematic of MgO crystal sputtered on amorphous substrate

Jitend ,  a Pal SINGH ,  Sung Ok WON 외 2명

한국진공학회 학술발표회초록집

2016 .08

Phase Transition Behavior of Mixed Vanadium Oxide Phases Deposited by r.f. Magnetron Sputtering

김혜준 ,  김진아 ,  강구민 외 1명

한국진공학회 학술발표회초록집

2019 .08

Epitaxial growth of Tin Oxide thin films deposited by powder sputtering method

백은하 ,  김소진 ,  강현철

한국진공학회 학술발표회초록집

2015 .08

Nitrogen doped Titanium Oxide Thin Films Fabricated by DC Magnetron Sputtering Method

H. Jee ,  J. W. Jang ,  S. J. Lee 외 1명

한국진공학회 학술발표회초록집

2020 .08

Characteristics of the ZnO thin film transistors deposited by a sputter and solution process

Sungho Pa ,  k ,  Byung Jun Kim 외 3명

한국진공학회 학술발표회초록집

2018 .02

A new sputtering method : Neutral beam assisted sputtering system to form high quality gas barriers for OLED applications

SeungMin Shin ,  YunSung Jang ,  Seungjun Yi 외 1명

한국진공학회 학술발표회초록집

2017 .02

A study on the optical and electrical properties of nickel oxide thin films deposited by reactive magnetron sputtering process

Seong woo Jang ,  Sehoon Hwang ,  Sang-Ho Lim 외 1명

한국진공학회 학술발표회초록집

2017 .02

Effect of Pressure and Temperature on Al-doped Zinc Oxide Thin Films Deposited by Radio Frequency Magnetron Sputtering

Junyoung Kang ,  Hyeongsik Pa ,  k 외 1명

한국진공학회 학술발표회초록집

2016 .02

Sputter deposition of Zr-V-Fe (St707) alloy films for NEG applications

Azuma MISHIMA ,  Naoyuki HAYASAKA ,  Kei OYA 외 3명

한국진공학회 학술발표회초록집

2016 .08