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논문 기본 정보
- 자료유형
- 학술저널
- 저자정보
- 저널정보
- 한국진공학회(ASCT) Applied Science and Convergence Technology Applied Science and Convergence Technology Vol.31 No.3
- 발행연도
- 2022.5
- 수록면
- 63 - 70 (8page)
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초록· 키워드
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Since the realization of the prospect of synthesizing graphene via mechanical exfoliation, graphene has garnered considerable attention owing to its remarkable chemical, electrical, material, and various other properties, which makes it an ideal contender for electronic and optoelectronic applications. Many top-down and bottom-up strategies have been researched to fabricate graphene films, notably chemical vapor deposition (CVD), which has been proven to deliver large-area, high-quality graphene films with the additional advantage of being economical. However, graphene production utilizing gaseous predecessors, such as methane, typically requires high temperatures, which increases the production cost due to the high thermal budget. Recently, the prospect of employing low-temperature conditions for graphene growth has been explored, using various hydrocarbon precursors and alternative energy sources. This review discusses the low-temperature CVD growth of graphene and recent improvements in this area with a brief introduction to applications based on these graphene specimens.
목차
ABSTRACT
1. Introduction
2. Low-temperature CVD growth of the graphene
3. Applications of low-temperature CVD graphene
4. Summary and Outlook
References
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